| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid image image sensor having a high sensitivity wherein the feeding of hydrogen to its substrate which is necessary for reducing its dark current is performed effectively without damaging substantially the anti-reflecting effect of its anti-reflection film, and the image quality of its output image is good. SOLUTION: The solid image image sensor has a semiconductor substrate 1, a plurality of light receiving portions 2 formed in the semiconductor substrate, and an anti-reflection film 6 formed on each light receiving portion. The anti-reflection film has an opening 6a in a portion present on each light receiving portion. COPYRIGHT: (C)2005,JPO&NCIPI
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