发明名称 THIN PLATE TRANSFERRING METHOD, SEMICONDUCTOR CHIP MOUNTING METHOD, SEMICONDUCTOR-MOUNTED SUBSTRATE, AND ELECTRONIC DEVICE AND ELECTRONIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide a thin plate transferring method for steadily transferring a thin plate from the source to the destination without deformation or damage, a semiconductor chip mounting method for transferring the semiconductor chip to and mounting the same on a wired substrate, a semiconductor-mounted substrate and an electronic device high in reliability, and an electronic component having the device. SOLUTION: In this semiconductor chip mounting method, a semiconductor chip P (thin plate) is transferred from the source to the destination with the semiconductor chip P held on the holding surface 2 of a holding member 1 with a liquid Q in between, and is mounted on a wired substrate 20. The mounting method comprises a first step of forming a liquid drop Q1 on the holding surface 2, a second step of making the holding surface 2 hold the semiconductor chip P preset in the source with help of surface tension between the holding surface 2 and the liquid Q, a third step of transferring the semiconductor chip P to the destination as held on the holding surface 2, and a fourth step of separating the semiconductor chip P from the holding surface 2 at the destination. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005033014(A) 申请公布日期 2005.02.03
申请号 JP20030196730 申请日期 2003.07.14
申请人 SEIKO EPSON CORP 发明人 SATO HIDEKAZU;NISHIYAMA YOSHIHIDE;KOBAYASHI TOMONAGA
分类号 H01L21/50;(IPC1-7):H01L21/50 主分类号 H01L21/50
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