GAS FLOW RATE STABILIZATION MECHANISM IN PRESSURE REGULATOR

摘要

PROBLEM TO BE SOLVED: To assemble a pressure regulator without tilting a flexible film for stabilizing a gas flow rate. SOLUTION: In the pressure regulator, a flat face 24 extending in the longitudinal direction of a lever member 25 is formed on the lever member side in a connection part 23 between a regulation rod 21 attached to the flexible film 18 and the lever member 25 journaled inside a pressure regulation chamber. The lever member 25 and the regulation rod 21 are brought into linear/plane contact with each other in the connection part 23 in this gas flow rate stabilization mechanism in the pressure regulator. COPYRIGHT: (C)2005,JPO&NCIPI