| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface light source apparatus enabling image recognition by parallel beams. SOLUTION: The light source apparatus is used to project the objective image such as a circuit image pattern onto the surface of a sample or the like as the objective material or to acquire the objective image for an inspection apparatus. A surface light emitting part having an electroluminescence function in a size to cover the entire objective image such as a circuit image pattern is used as the surface light source so that a desired image pattern can be recognized by parallel beams generated by the surface light source. COPYRIGHT: (C)2005,JPO&NCIPI
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