| 摘要 |
PROBLEM TO BE SOLVED: To avoid problems such as the damage of a furnace material, supercooling or solidification of a raw material molten liquid or the breaking of a rectangular crucible in the manufacture of polycrystalline silicon wafer by decreasing the width of temperature distribution in the horizontal direction of the rectangular crucible. SOLUTION: This plate-like silicon manufacturing apparatus is provided with the rectangular crucible and an induction heating coil, and has a heat insulating material on at least a part of an opening part of the rectangular crucible. It is preferable that the heat insulating material is arranged on the center part of a side in the opening part of the rectangular crucible and has a lower part and an upper part which have a different shape or different material from each other. It is further preferable that the heat insulating material has projecting and recessed parts on a surface which is in contact with the opening part of the rectangular crucible. COPYRIGHT: (C)2005,JPO&NCIPI
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