| 摘要 |
PROBLEM TO BE SOLVED: To provide a suck back valve, eliminating the need for piping work between an on/off valve and itself while reducing a installation space with a reduction in size and weight. SOLUTION: The suck back valve comprises an on/off valve mechanism 26 for opening/closing a fluid passage 34 by displacing a valve member 50 integrally with a first piston 48 under the operation of pressure fluid supplied into a first cylinder chamber 60, and a suck back mechanism 28 having a deformable suction member 92 in which a distribution chamber 96 is formed, for sucking the pressure fluid in the fluid passage 34 by displacing the suction member 92 integrally with a second piston 74 under the operation of the pressure fluid supplied into a second cylinder chamber 80. The on/off valve mechanism 26 and the suck back mechanism 28 are coaxially assembled into one unit. COPYRIGHT: (C)2005,JPO&NCIPI
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