| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a silicon single crystal, with which it is possible to stably pull with high reliability. SOLUTION: When the silicon single crystal is grown by a CZ method, the apparatus for manufacturing the silicon single crystal is used for forming a small diameter part for preventing the generation of dislocations in a silicon single crystal ingot just below a seed crystal, then forming a nearly columnar part to be held by enlarging diameter to a diameter larger than that of the small diameter part and smaller than the final diameter of the target ingot, and thereafter pulling the silicon single crystal ingot while growing the ingot having a desired diameter and length while mechanically holding the part to be held. A structure having a plurality of gripping pieces, each engaging with a guide ring and with the inner peripheral part of the guide ring, and capable of sliding in the up-and-down direction, and a push-in mechanism for pressing each gripping piece downward while engaging with the piece from the upper side is adopted as a mechanical holding means so as to perform mechanical holding exactly and stably. COPYRIGHT: (C)2005,JPO&NCIPI
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