GLASS PLATE WITH TRANSPARENT CONDUCTIVE FILM, ITS PRODUCTION METHOD, AND PHOTOELECTRIC CONVERSION DEVICE USING THE GLASS PLATE

摘要

PROBLEM TO BE SOLVED: To provide a glass plate with a transparent conductive film having strong adhesive force and improved light transmittance while having an SiOC film as the substrate film. SOLUTION: The glass plate with a transparent conductive film includes an SiOC film 2 formed on a glass plate 1 and a transparent conductive film 3 which contains tin oxide as the main component and is formed so as to be in contact with the film 2. The adhesive force of the transparent conductive film 3, according to JIS R3255-1997, is 90 mN or higher. While the thickness of the SiOC film 2 is 20-120 nm and that of the transparent conductive film 3 is 400-2,000 nm, the absorptivity of a thin film consisting of the films 2 and 3 in a wavelength range of 400-500 nm is set at 7.5 % or less. The glass plate is obtained by bringing an airflow containing an oxidant into contact with the surface of the SiOC film 2 and forming the transparent conductive film 3 on the surface. COPYRIGHT: (C)2005,JPO&NCIPI