SOLID-STATE PIEZOELECTRIC MOTION TRANSDUCER

摘要

The present invention provides a solid-state piezoelectric motion transducer device formed by thin films. The motion transducer is used for generating an electrical signal output proportional to motion quantities such as acceleration, vibration, and rotation. The motion transducer is also used for generating motion in response to applied electrical input signals. The precision thin-film piezoelectric elements (13-20) are configured and arranged on a semi-rigid structure (1, 7) with a high degree of symmetry, thereby providing improved correlation between the electrical input or output signal quantities and the associated mechanical motion.