| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an Ag alloy reflective film for a reflector and the reflector excellent in surface smoothness and high reflectance even under the heating environment, and to provide a sputtering target for depositing the Ag alloy reflective film. <P>SOLUTION: (1) The surface roughness Ra of the Ag alloy reflective film for the reflector is ≤ 2.0 nm. (2) The Ag alloy reflective film contains, by atom, 0.1-3.0 % rare earth element (Nd or the like) in total, or further 0.5-5.0 atm.% in total one or more kinds of Au, Pd, Cu or Pt. (3) In the reflector, the Ag alloy reflective film is deposited on a base body. (4) The Ag alloy sputtering target used for depositing the Ag alloy reflective film contains, by atom, 0.1-3.0 % rare earth element, or further 0.5-5.0% in total one or more kinds of Au, Pd, Cu or Pt. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
