SEMICONDUCTOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor inspection device capable of easily selecting a target inspecting position. SOLUTION: The photograph of an object to be inspected is displayed on a monitor and the component difference between the present coordinates and the coordinates of the region designated by a pointing device is calculated as the number of pixels of the photograph of the object to be inspected displayed on the monitor. An actual moving distance is calculated from the number of pixels and the display resolving power of the image of the object to be inspected to control the movement of the object to be inspected. COPYRIGHT: (C)2005,JPO&NCIPI