| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film capacitor that can obtain a more large electrostatic capacitance even when the capacitor has a small size, and to provide a method of manufacturing the capacitor. SOLUTION: In the thin film capacitor, a first thin dielectric film 13(A), an another kind of thin electrode conductor film 14, and a second thin dielectric film 13(B) are arranged in this order between the same kind of thin electrode conductor films 17(A) and 17(B) adjoining each other in the direction of lamination. In addition, first and second thin coupling conductor film sections 19a and 19b are respectively protruded into first and second through holes 13h(A) and 13h(B) from the same kind of thin electrode conductor films 17(A) and 17(B) and an integral coupling conductor section 19 is formed in a second through hole 16 by coupling the first and second thin coupling conductor film sections 19a and 19b with each other. COPYRIGHT: (C)2005,JPO&NCIPI
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