CONVEYANCE SYSTEM AND SEMICONDUCTOR MANUFACTURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a conveyance technique for improving a conveyance capability while taking advantage of an existing system when enhancing or expanding the conveyance system. SOLUTION: This conveyance system includes a plurality of manufacturing apparatuses 1; a track 2 connecting among the apparatuses 1; and a plurality of conveyance vehicles 3 different in performance and driving along the track 2 to convey objects to be conveyed among the apparatuses 1, and has a configuration in which the plurality of vehicles 3 different in performance coexist and drive on the same track 2. The vehicles 3 are provided in a state where old model vehicles 3a and new model vehicles 3b coexist and drive with respective performance (travelling performance such as a travelling speed and an acceralating/decelerating speed, and transfer performance such as a transfer speed) of vehicle 3a, 3b. COPYRIGHT: (C)2005,JPO&NCIPI