发明名称 METHOD FOR SETTING-UP MULTIBLADES, METHOD FOR MEASURING INTERVAL OF BLADES, AND METHOD FOR DETECTING STATE OF BLADES
摘要 PROBLEM TO BE SOLVED: To provide a method which quickly and exactly sets up multiblades. SOLUTION: The method for setting-up the multiblades is provided in a cutting apparatus which comprises the multiblades having a plurality of cutting blades arranged in parallel on a rotary spindle, and a sensor means capable of individually measuring the positions of the cutting edges of the cutting blades. The method for setting-up the multiblades is characterized in that first, the height of the multi-blades is temporarily set up based on the position of the cutting edge of one cutting blade (temporary setting-up stage), secondly, the positions of the cutting edges of one, or two or more cutting blades are measured respectively by means of the sensor means in the state that the temporarily set-up height of the multiblades is kept intact (measurement stage), and finally, the height of the multiblade is finally set up based on the measured results in the measurement stage (final setting-up stage). COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005028479(A) 申请公布日期 2005.02.03
申请号 JP20030194524 申请日期 2003.07.09
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUBARA MASAYUKI;KISE TAIZO;MURAYAMA YASUTAKA
分类号 B26D7/27;B23Q17/00;B23Q17/24;B24B27/06;B24B45/00;B26D5/02;H01L21/301;(IPC1-7):B23Q17/00 主分类号 B26D7/27
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