发明名称 LIQUID DROP DISCHARGING DEVICE, ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE MANUFACTURING METHOD, AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a liquid drop discharging device capable of detecting a dried state of a nozzle before the occurrence of a clogging in the nozzle, thereby preventing a low productivity possibly caused due to the nozzle clogging. SOLUTION: The liquid drop discharging device 100 has a discharge head 101 for changing a liquid material into liquid drops so as to discharge the same through a nozzle 112. Further, the liquid drop discharging device 100 comprises a vibrator 124 whose frequency changes corresponding to the mass of substances adhering to its surface, a detecting unit 122 for detecting the frequency of the vibrator 124 before and after the adhering of the liquid drops, a computing unit 131 for computing a solid concentration of the liquid drops adhering to the vibrator in accordance with the detection result of the detecting unit 122, a control device 105 for determining the dried state of the nozzle 112 in accordance with the computation result in the computing unit 131. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005028280(A) 申请公布日期 2005.02.03
申请号 JP20030195829 申请日期 2003.07.11
申请人 SEIKO EPSON CORP 发明人 MASUDA TAKASHI
分类号 B41J2/175;B05C5/00;B05C11/00;B05D3/00;B05D7/00;G01G3/16;H01L21/027;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B05C5/00 主分类号 B41J2/175
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