| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum utilizing device partly including vacuum such as an absorption refrigerator for conducting prescribed processes using the vacuum, in which quick startup is achieved, and in which maintenance is simplified. SOLUTION: This is a vacuum utilizing device such as an absorption refrigerator, a vacuum drier, a vacuum deaerator, and a vacuum evaporator. It has a vacuum pump A to form the vacuum, that is composed as a high vacuum achieving type dry vacuum pump A1 having a valve element of low water repellency material. The high vacuum degree achieving type dry vacuum pump A1 includes a diaphragm type dry vacuum pump, for example, in which a diaphragm 3 is a pump head inner surface profiling type diaphragm. COPYRIGHT: (C)2005,JPO&NCIPI
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