| 摘要 |
PROBLEM TO BE SOLVED: To provide a plate-like body conveyance device capable of reducing load for a plate-like body by suppressing pulsating flow of clean air supplied onto a lower face of the plate-like body to suppress breakage of the plate-like body. SOLUTION: This plate-like body conveyance device is provided with an air blowing type support means 3, a dust removing filter 12 for removing dust, an air blowing means 13 for supplying clean air toward the lower face of the plate-like body 2 through the dust removing filter 12, and a shielding body 41 for shielding in such a way that the clean air passing through the dust removing filter 12 flows and dropping of a foreign matter onto a dust removing filter 12 side is prevented. The shielding body 41 is provided to form a chamber C in which clean air is collected between the dust removing filter 12 and it. COPYRIGHT: (C)2005,JPO&NCIPI
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