发明名称 METHOD AND APPARATUS FOR PICKING UP WORKPIECE AND MOUNTING MACHINE
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for picking up a workpiece such as a chip which can avoid the possibility of damage of the workpiece, and a mounting machine therefor. SOLUTION: The workpiece pickup method comprises steps of sucking and holding a workpice bonded to an adhesive sheet, peeling the workpiece off from the sheet and transporting the workpiece, with use of a sucking collet disposed to be moved up and down above the workpiece bonded to the adhesive sheet for sucking and holding the workpiece and a sucking member disposed to be moved up and down under the adhesive sheet for sucking and holding the adhesive sheet. In the method, the lower surface of the adhesive sheet corresponding to the workpiece is sucked and held by the sucking member (sheet sucking step), the workpiece is sucked, held and peeled off by the sucking collet in a positional relationship between the sucking collet and the workpiece (workpiece sucking step). COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005033079(A) 申请公布日期 2005.02.03
申请号 JP20030272379 申请日期 2003.07.09
申请人 TDK CORP 发明人 SUZUKI HIDETOSHI;SHINDO OSAMU
分类号 H01L21/67;B32B1/00;H01L21/00;H01L21/50;H01L21/52;H01L21/68;H05K13/00;(IPC1-7):H01L21/52 主分类号 H01L21/67
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