| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-axis servo control device which will not vibrates, even if each movable part is concurrently operated, which operates without being influenced by interference of other axis, and which is capable of increasing the operation speed. SOLUTION: The multi-axis servo control device for a device which is provided with a plurality of movable parts and each actuator activating each of the movable part and which vibrates the machine as a whole by each thrust of each movable part, is provided with a thrust calculating part 1, where a control part calculates back transfer function in consideration of interfering force of the other axis and even a vibration element of the whole machine with a command of all movable parts as an input, and calculates a thrust command; a position calculating part 2 which calculates the position of the movable part, when operating by the thrust; an error compensating part 3 which outputs compensating thrust reducing the error between the position calculated in the position calculating part 2 and the actual position of the movable part; and an adder 4 which adds the compensating thrust to the thrust command and defines it as a final thrust command value. COPYRIGHT: (C)2005,JPO&NCIPI
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