| 摘要 |
PROBLEM TO BE SOLVED: To reduce errors due to asymmetry in an alignment signal from an alignment mark, and to provide a position detection method for precisely performing position detection. SOLUTION: The position of an object to be detected is detected, using the signal of an image of the alignment mark, composed of a plurality of mark elements formed on the object to be detected. The method includes steps of: obtaining first positional information representing the central position of the alignment mark approximated by the whole shape of the signal; obtaining a plurality of second positional information pieces representing the central position of the alignment mark calculated from all points of inflection of the signal; and selecting the second positional information piece at a prescribed distance, as the central position of the alignment mark, from the plurality of second information pieces, on the basis of the first positional information. COPYRIGHT: (C)2005,JPO&NCIPI |
