| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To detect abnormality which occurs in an important process formed of a plurality of processors at an early stage and to remove a factor caused by the device in a manufacturing process. <P>SOLUTION: A device status discrimination system of the manufacturing process where a plurality of processors are arranged in the same process is provided with a difference information generation means 4 formed of comparators 41, 42 and 43 generating difference information on measurement signals 11, 21 and 31 output from the respective processors 1, 2 and 3, and a status discrimination means 5 formed of logic circuits 51, 52 and 53 discriminating the status of the processors 1, 2 and 3 by synthetically determining a plurality of pieces of difference information generated in the difference information generation means 4. Thus, the abnormal device can be correctly specified at the early stage. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
