| 发明名称 |
FILM FORMING METHOD, DEVICE PRODUCING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC DEVICE |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film forming method which is suitable for trituration and for improving the physical properties of a film. <P>SOLUTION: In the method, liquid material droplets are arranged on a substrate, and the film is formed on the substrate. The droplets are shrunk to form the dry film of the droplets. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005028279(A) |
申请公布日期 |
2005.02.03 |
| 申请号 |
JP20030195828 |
申请日期 |
2003.07.11 |
| 申请人 |
SEIKO EPSON CORP |
发明人 |
MASUDA TAKASHI |
| 分类号 |
G02B5/20;B05D3/02;B05D7/00;G09F9/00;(IPC1-7):B05D3/02 |
主分类号 |
G02B5/20 |
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