| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater that can perform uniform and efficient heating. SOLUTION: The heater is provided with a heating chamber 3, a table 4 disposed in the heating chamber 3 to carry an object to be heated, and a heating unit 5 having a planar heater 50 disposed in the heating chamber 3. The planar heater 50 is designed to be adjustable in distance to the object to be heated as maintaining a parallel relation to the table 4. COPYRIGHT: (C)2005,JPO&NCIPI
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