| 摘要 |
PROBLEM TO BE SOLVED: To provide a layered body for thin film deposition with which, even in the case dimensional deformation (plastic deformation) is generated in a cooling plate, a bolt hole and a water feed-discharge port through which cooling water is made to flow provided in a support member and an opening hole provided in the cooling board can be communicated in a normal arrangement state. SOLUTION: The layered body 20 for thin film deposition is composed in a state wherein a target material 21 and a cooling board 23 are layered. The cooling board 23 is composed of a stock having a rigidity lower than that of the target 21 and a thermal expansion coefficient different from that of the same. Then, bolt holes 231 on the side of the cooling board are formed of a shape elongating from the central position of each bolt hole 231 to the central position C in positioning and to the direction IH opposite thereto. Water feed-discharge ports 241 on the side of the cooling board are arranged in a state where the central position is deviated to a direction almost opposite to the direction WH going from the central position of the water feed-discharge port 15 on the side of the system to the central position C in positioning. COPYRIGHT: (C)2005,JPO&NCIPI
|
