FILM PEELING OFF DEVICE AND ITS PEELING OFF ROLLER

摘要

PROBLEM TO BE SOLVED: To peel off a film from a substrate not depending on degree of adhesion and the state of adhesion with the substrate of the film without contaminating the substrate. SOLUTION: The film peeling off device 100 for peeling off the film 6 adhered to the substrate 4 from its end is provided with a start roller 10 having circular disc-like tooth, a circular saw-like tooth or a file-like projection on an outer periphery; and an adhesive roller 11 having an adhesive member on an outer periphery. The start roller 10 is pressed to an end of the film 6 adhered to the substrate 4 and is rotated, and the end of the film 6 is floated from the substrate 4. The adhesive roller 11 is pressed to the end of the film 6 floated by the start roller 10 and is rotated, and the end of the film 6 is peeled off from the substrate by the adhesive roller 11. COPYRIGHT: (C)2005,JPO&NCIPI