| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet head which can be driven at a low voltage, a high-productivity manufacturing method for the inkjet head, and an inkjet recording apparatus which is equipped with the inkjet head. SOLUTION: This inkjet head is equipped with a nozzle hole 4, an ejection chamber 5, a diaphragm 8, an electrode 12 which faces the diaphragm 8 in a nonparallel state in either or both of longitudinal and short-side directions, and an electrode substrate 2 wherein the electrode 12 is formed. A recess 11 corresponding to a shape of a gap between the diaphragm 8 and the electrode 12 is formed in a single crystalline silicon substrate whose crystal face (111) is inclined at a predetermined angle with respect to a substrate face, so that the electrode substrate 2 can be made; and a bottom face of the recess 11 is partially or wholly composed of the crystal face (111) which is inclined at the predetermined angle with respect to the substrate face. COPYRIGHT: (C)2005,JPO&NCIPI
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