VIBRATION ISOLATING DEVICE USING MAGNETIC LEVITATING DEVICE

摘要

For stably supporting a vibration isolating table to isolate a vibration-protected apparatus from external vibrations, a vibration isolating apparatus comprises a vibration isolating table 10; magnetic levitation devices 31 - 34 for supporting the vibration isolating table 10 without contact and applying a control force thereto; displacement sensors 41 - 44 for detecting amounts of relative displacement of the vibration isolating table 10 with respect to a foundation to output displacement signals; and acceleration sensors 61 - 63 for outputting acceleration signals upon detection of vibrations of the foundation. A controller 5 comprises a first control loop for feeding the displacement signals back to the magnetic levitation devices 31 - 34 to determine a relative position of the vibration isolating table 10 with respect to the foundation; and a second control loop for compensating the acceleration signals and feeding the compensated acceleration signals forward to the magnetic levitation devices 31 - 34 to suppress vibrations propagating from the foundation to the vibration isolating table 10.