Piezoelectric vibrating element, supporting structure therefor, piezoelectric vibrator and piezoelectric vibrating gyroscope

摘要

Described is a vibrating element (10) comprising a base section (12), a plurality of excited vibration arms (16-1 through 16-4) and sensing vibration arms (20-1, 20-2) extending from the base section (12) in a single plane, wherein a plurality of first beams (32-1 through 32-4) having elasticity extend from the base section (12) and between the vibration arms and, first supporting sections (30-1 through 30-4) are formed at the tips of the first beams. The excited vibration arms and the sensing vibration arms are provided with electrode patterns formed thereon to be connected to and driven by a semiconductor device (80). The piezoelectric element (10) is encapsulated by a container composed of a base member (82) and a lid member (84) to form a vibrator (200) and a gyroscope (90), and stable excited vibrations and stable sensing vibrations are maintained.