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发明名称
PLASMA PROCESSING APPARATUS HAVING ROTATING MAGNETS
摘要
申请公布号
EP1033068(B1)
申请公布日期
2005.02.02
申请号
EP19980954885
申请日期
1998.11.03
申请人
BARANKOVA, HANA;BARDOS, LADISLAV
发明人
BARANKOVA, HANA;BARDOS, LADISLAV
分类号
H05H1/02;H05H1/46;C23C14/34;H01J37/32;H01J37/34;H05H1/14;H05H1/50;(IPC1-7):H05H1/02
主分类号
H05H1/02
代理机构
代理人
主权项
地址
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