摘要 |
PURPOSE: An apparatus for feeding and discharging a flat panel display substrate is provided to maximize efficiency of a substrate processing apparatus and reduce the size of the substrate processing apparatus by enabling two flat display substrates to be processed simultaneously. CONSTITUTION: The first substrate feeding part includes a drive part, wherein one side of the first substrate feeding part is coupled to a base(3) by a hinge and the other side thereof is comprised of a free end part. The second substrate feeding part includes a drive part for moving a substrate, wherein one side of the second substrate feeding part is coupled to the base by a hinge and the other side thereof is comprised of a free end part. The free end part of the first substrate feeding part is faced toward that of the second substrate feeding part. A drive source, coupled to the first and second feeding parts and the base, drives the first and second feeding parts so that they can be rotated centering around a hinge coupling point.
|