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发明名称
摘要
申请公布号	JP3616236(B2)	申请公布日期	2005.02.02
申请号	JP19970262305	申请日期	1997.09.26
申请人		发明人
分类号	G01R1/073;H01L21/66;(IPC1-7):G01R1/073	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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