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发明名称
摘要
申请公布号
JP3615453(B2)
申请公布日期
2005.02.02
申请号
JP20000081666
申请日期
2000.03.23
申请人
发明人
分类号
C30B23/08;C30B25/14;H01L21/203;H01S5/42;(IPC1-7):C30B23/08
主分类号
C30B23/08
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