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申请公布号
JP3617441(B2)
申请公布日期
2005.02.02
申请号
JP20000322725
申请日期
2000.10.23
申请人
发明人
分类号
G01L9/04;G01L9/00;G01L19/04;G01L19/06;H01L29/84;(IPC1-7):G01L9/04
主分类号
G01L9/04
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