发明名称 A process of producing a semiconductor device
摘要 A semiconductor device having a semiconductor element, characterized in that said semiconductor device comprises a stacked body obtained by providing a laminate comprising said semiconductor element and a sealing resin which are interposed between a surface member and a back face member, vacuuming said laminate at a vacuum degree of 5 Torr or less for 5 to 40 minutes, subjecting the laminate thus treated to thermocompression bonding at a vacuum degree of 5 Torr or less, and cooling the laminate having subjected to said thermocompression bonding to engage in contact bonding. And a process for the production of a semiconductor device. The semiconductor device is free of the generation of air bubble therein. <IMAGE>
申请公布号 EP0755080(B1) 申请公布日期 2005.02.02
申请号 EP19960111710 申请日期 1996.07.19
申请人 CANON KABUSHIKI KAISHA 发明人 ICHIRO, KATAOKA;TAKAHIRO, MORI;SATORU, YAMADA;HIDENORI, SHIOTSUKA;AYAKO, KOMORI
分类号 H01L31/04;H01L31/042;H01L31/048;H01L31/052 主分类号 H01L31/04
代理机构 代理人
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