发明名称 |
A process of producing a semiconductor device |
摘要 |
A semiconductor device having a semiconductor element, characterized in that said semiconductor device comprises a stacked body obtained by providing a laminate comprising said semiconductor element and a sealing resin which are interposed between a surface member and a back face member, vacuuming said laminate at a vacuum degree of 5 Torr or less for 5 to 40 minutes, subjecting the laminate thus treated to thermocompression bonding at a vacuum degree of 5 Torr or less, and cooling the laminate having subjected to said thermocompression bonding to engage in contact bonding. And a process for the production of a semiconductor device. The semiconductor device is free of the generation of air bubble therein. <IMAGE> |
申请公布号 |
EP0755080(B1) |
申请公布日期 |
2005.02.02 |
申请号 |
EP19960111710 |
申请日期 |
1996.07.19 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
ICHIRO, KATAOKA;TAKAHIRO, MORI;SATORU, YAMADA;HIDENORI, SHIOTSUKA;AYAKO, KOMORI |
分类号 |
H01L31/04;H01L31/042;H01L31/048;H01L31/052 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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