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发明名称
Fast high resolution lens
摘要
申请公布号
EP0809125(B1)
申请公布日期
2005.02.02
申请号
EP19970106031
申请日期
1997.04.12
申请人
CARL ZEISS SMT AG
发明人
FUERTER, GERD
分类号
G02B17/08;G03F7/20;(IPC1-7):G02B6/38
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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