CHROME THIN FILM OF AN LCD AND A METHOD OF FABRICATING THE CHROME THIN FILM TO IMPROVE SPECIFIC RESISTANCE AND WARP CHARACTERISTICS OF GLASS

摘要

PURPOSE: A chrome thin film of an LCD(Liquid Crystal Display) and a method of fabricating the chrome thin film are provided to improve specific resistance and warp characteristics of glass by performing a thermal process during the formation of the chrome thin film used as a gate electrode in the LCD. CONSTITUTION: A glass substrate is cleaned so as to remove a foreign substance(S201). A chrome thin film is formed on the glass substrate(S203). The chrome thin film is annealed for its recrystallization(S205). Inert gas flows into a chamber under the state that the recrystallization of the chrome thin film has been completed, and thereby the glass substrate and the chrome thin film are cooled off firstly and then the chamber is opened so that they can be cool off secondly at the normal temperature(S207).