APPARATUS FOR TRANSFERRING WAFER ENHANCING TRANSFER EFFICIENCY OF WAFER BY TRANSFERRING SIMULTANEOUSLY MULTIPLE WAFERS WITH TWO ROBOTS

摘要

PURPOSE: An apparatus for transferring wafer is provided to enhance the transfer efficiency of a wafer, so that is able to improve the productivity. CONSTITUTION: A wafer transferring unit includes a multitude of robotic arms(232a,232b,234a,234b) and a driving unit. The multitude of robotic arms hold and transfer wafer(10) received in at least one wafer carriers(20a,20b). The multitude of robotic arms is moved within the transferring chamber(210) by the driving unit. Each robotic arm is a horizontal multi-articulated robotic arm. The driving unit is a ball screw type of linear motion unit.