发明名称 Semiconductor device and method for fabricating the same
摘要 Disclosed is a semiconductor device having a double dielectric layer, wherein the double dielectric layer comprises a first dielectric layer having aluminum and a second dielectric layer, of which a dielectric constant is higher than that of the first dielectric layer, stacked on the first dielectric layer. Also disclosed are methods for fabricating the semiconductor device.
申请公布号 US6849505(B2) 申请公布日期 2005.02.01
申请号 US20020241661 申请日期 2002.09.12
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE KEE-JEUNG;OH JONG-HYUK
分类号 H01L29/78;C23C16/30;C23C16/40;H01L21/28;H01L21/314;H01L21/316;H01L21/318;H01L21/8242;H01L27/108;H01L29/51;(IPC1-7):H01L21/824 主分类号 H01L29/78
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