发明名称 Interferometer using integrated imaging array and high-density polarizer array
摘要 An integrated imaging element for an interferometer generates at least one image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density polarizing array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated because multiple phase-shifted interference image information for a small region of an object is provided within a small region on the detector device.
申请公布号 US6850329(B2) 申请公布日期 2005.02.01
申请号 US20020270130 申请日期 2002.10.15
申请人 MITUTOYO CORPORATION 发明人 TOBIASON JOSEPH D.;ATHERTON KIM W.
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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