发明名称 |
Fabrication of precision optics using an imbedded reference surface |
摘要 |
The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.
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申请公布号 |
US6849859(B2) |
申请公布日期 |
2005.02.01 |
申请号 |
US20010817334 |
申请日期 |
2001.03.21 |
申请人 |
EUV LIMITED LIABILITY CORPORATION |
发明人 |
FOLTA JAMES A.;SPILLER EBERHARD |
分类号 |
G02B1/10;G02B27/00;(IPC1-7):G01N21/86;H01L21/66 |
主分类号 |
G02B1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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