发明名称 Flash memory with UV opaque passivation layer
摘要 A method for making a flash memory having a passivation layer that is not transparent to ultraviolet light. The method forming a semiconductor substrate that includes flash memory cell having floating gate, then forming a conductive layer on the substrate. Process induced charge that has accumulated on the flash cell floating gate is then neutralized and a passivation layer, which is not transparent to ultraviolet light, is formed on the conductive layer.
申请公布号 US6849896(B2) 申请公布日期 2005.02.01
申请号 US20010052853 申请日期 2001.11.09
申请人 INTEL CORPORATION 发明人 WADA GLEN;GIRIDHAR RAGHUPATHY V.;OZZELLO ANTHONY
分类号 H01L21/28;H01L23/552;(IPC1-7):H01L29/788 主分类号 H01L21/28
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