发明名称 Method for fabricating microelectronic product with attenuated bond pad corrosion
摘要 A method for fabricating a microelectronic product provides for forming a planarizing layer upon a bond pad and a topographic feature, both formed laterally separated over a substrate. The planarizing layer is formed with a diminished thickness upon the bond pad such that it may be readily etched to expose the bond pad while employing as a mask an additional layer formed over the topographic feature but not over the bond pad. The method is particularly useful for forming color filter sensor image array optoelectronic products with attenuated bond pad corrosion.
申请公布号 US6849533(B2) 申请公布日期 2005.02.01
申请号 US20030354697 申请日期 2003.01.29
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD 发明人 CHANG CHIH-KUNG;HSIAO YU-KUNG;PAN SHENG-LIANG;WONG FU-TIEN;KUO CHIN-CHEN;HSIUNG CHUNG-SHENG;HSU HUNG-JEN;DAI YI-MING;LIN PO-WEN;TSENG TE-FU
分类号 H01L21/44;H01L21/60;(IPC1-7):H01L21/44 主分类号 H01L21/44
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