发明名称 Optical fiber block photo mask for loss reduction
摘要 A photomask is disclosed for the fabrication of an optical fiber block including a first section provided with slit arrays adapted to form an optical fiber alignment region of the optical fiber block while having a uniform slit pitch, partition portions arranged between adjacent ones of the slit arrays while having a pitch larger than the slit pitch, and end portions arranged outside the slit arrays while having a pitch larger than the slit pitch. The photomask also includes a second section adapted to form a stress-reducing recessed region of the optical fiber block etched to a desired depth from the level of the optical fiber alignment region. The photomask also includes auxiliary slit arrays arranged at an interface between the first and second sections. The auxiliary slit array includes at least one slit.
申请公布号 US6850676(B2) 申请公布日期 2005.02.01
申请号 US20020193433 申请日期 2002.07.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM JONG-YOUL;BAEK SEUNG-JIN;KIM JAE-WAN
分类号 G02B6/24;G02B6/12;G02B6/30;G02B6/36;G03F1/00;G03F1/08;G03F1/14;G03F1/70;(IPC1-7):G02B6/00;G03F9/00 主分类号 G02B6/24
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