发明名称 Electrode configuration in a MEMS switch
摘要 A microelectromechanical system (MEMS) switch that includes a signal contact, an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode. The signal contact includes a first portion and a second portion. The actuation electrode is positioned between the first and second portions of the signal contact.
申请公布号 US6850133(B2) 申请公布日期 2005.02.01
申请号 US20020219013 申请日期 2002.08.14
申请人 INTEL CORPORATION 发明人 MA QING
分类号 B81B3/00;H01H59/00;(IPC1-7):H01H51/22 主分类号 B81B3/00
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