METHOD FOR DRY-ETCHING MAGNETIC MATERIAL FOR REDUCING ETCHING DAMAGE DEGRADING MAGNETIC PROPERTY OF MAGNETIC MATERIAL

摘要

PURPOSE: A method for dry-etching a magnetic material is provided to reduce an etching damage degrading magnetic property of the magnetic material by etching the magnetic material using an inorganic material. CONSTITUTION: A plasma of an etching gas is formed by using an alcohol having at least one hydroxyl group used as the etching gas. The magnetic material is dry-etched by using a mask material made of a non-organic material. The alcohol used as the etching gas preferably has one hydroxyl group. The etching gas is an alcohol selected from the group consisting of methanol(CH3OH), ethanol(C2H5OH) and propanol(C3H7OH).