LID OPENING AND CLOSING DEVICE COMPOSED OF A SHAFT UNIT, AN ARM UNIT, AND AN ACTUATOR HAVING A MOTOR AND TWO REDUCERS

摘要

PURPOSE: A lid opening and closing device is provided to make the device small and to apply for a lid of a vacuum chamber for producing a semiconductor mechanism. CONSTITUTION: A lid opening and closing device(10) is composed of a shaft unit(20) supported by a case(91) of a container(90) and formed with a rotary shaft; an arm unit(40) combined with a lid(92) of the container and the rotary shaft; and an actuator for driving the rotary shaft. The actuator comprises a motor having a first output unit outputting power; a first reducer having a first input unit for receiving power from the first output unit and a second output unit outputting the power; and a second reducer having a second input unit receiving the power from the second output unit and a third output unit outputting the power to the rotary shaft. The first reducer decreases the output speed of the motor. The second reducer decreases the output speed of the first reducer.