发明名称 |
PLASMA REACTOR CAPABLE OF REDUCING MANUFACTURING COST AND VOLUME OF THE PLASMA REACTOR |
摘要 |
PURPOSE: A plasma reactor is provided to reduce manufacturing cost and a volume of the reactor by forming a faraday shield and a heat emitter in one entity. CONSTITUTION: A plasma reactor includes a coil antenna(106), a metallic member(109), and a plate(105). The coil antenna receives high frequency power and emits an electromagnetic wave. The metallic member shields the electromagnetic wave. The plate is provided on a lower portion of the metallic member to form a plasma generating region in the plasma reactor. The metallic member includes a heat emitter for heating the metallic member. The heat emitter is provided to adjust the temperature of the plate.
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申请公布号 |
KR20050011863(A) |
申请公布日期 |
2005.01.31 |
申请号 |
KR20030050910 |
申请日期 |
2003.07.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HAN, SANG CHUL;JEON, SANG JEAN;KIM, DONG CHEOL;KWON, TAE YONG |
分类号 |
H01L21/3065;(IPC1-7):H01L21/306 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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