| 摘要 |
PURPOSE: A method for preventing hygroscopy of a dielectric protective layer is provided to improve productivity by forming an amphiphilic molecular layer on a protective layer as a hygroscopy preventing layer. CONSTITUTION: A dielectric layer and a dielectric protective layer are formed on a display substrate. By preventing from disposing, an amphiphilic molecular layer is formed the dielectric protective layer. The amphiphilic molecular layer is a self-assembled monolayer. The amphiphilic molecular layer is made of a material selected from a group consisting of CH3(CH2)nSiCl3, CH3(CH2)nSi(OCH3)3, CH3(CH2)nSi(OCH2CH3)3, CH3(CH2)nSi£OCH(CH3)2|3, CF3(CF2)nSiCl3, CF3(CF2)nSi(OCH3)3, CF3(CF2)nSi(OCH2CH3)3, and CF3(CF2)nSi£OCH(CH3)2|3 and a compound thereof. |
