发明名称 METHOD OF DESIGNING TEST PATTERN FOR BLOCKING GATE TO REDUCE NUMBER OF UNNECESSARY PROCESSES
摘要 PURPOSE: A method of designing a test pattern for blocking a gate is provided to reduce number of unnecessary processes by using a gate oxide layer instead of an oxide layer. CONSTITUTION: A P-well(212) is formed on a semiconductor substrate(210). A gate is formed on the semiconductor substrate including the P-well. A threshold voltage ion implantation process is performed on the semiconductor substrate. A poly layer(216) is formed on the gate. An NM ion implantation process is performed on the semiconductor substrate. A lightly-doped drain spacer is formed on a lateral part of the gate. An N+ ion implantation process is performed on the semiconductor substrate.
申请公布号 KR20050011577(A) 申请公布日期 2005.01.29
申请号 KR20030050736 申请日期 2003.07.23
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 KIM, YONG KUK
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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