发明名称 |
METHOD OF DESIGNING TEST PATTERN FOR BLOCKING GATE TO REDUCE NUMBER OF UNNECESSARY PROCESSES |
摘要 |
PURPOSE: A method of designing a test pattern for blocking a gate is provided to reduce number of unnecessary processes by using a gate oxide layer instead of an oxide layer. CONSTITUTION: A P-well(212) is formed on a semiconductor substrate(210). A gate is formed on the semiconductor substrate including the P-well. A threshold voltage ion implantation process is performed on the semiconductor substrate. A poly layer(216) is formed on the gate. An NM ion implantation process is performed on the semiconductor substrate. A lightly-doped drain spacer is formed on a lateral part of the gate. An N+ ion implantation process is performed on the semiconductor substrate.
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申请公布号 |
KR20050011577(A) |
申请公布日期 |
2005.01.29 |
申请号 |
KR20030050736 |
申请日期 |
2003.07.23 |
申请人 |
MAGNACHIP SEMICONDUCTOR, LTD. |
发明人 |
KIM, YONG KUK |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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