| 摘要 |
A monolithic ink-jet printhead and a method for manufacturing the same are provided. The monolithic ink-jet printhead includes a substrate (110) having an ink chamber (132), a manifold (136), and an ink channel (134) and a nozzle plate (120) integrally formed with the substrate. The nozzle plate has a plurality of passivation layers sequentially stacked on the substrate, a metal layer (128) formed on the plurality of passivation layers, and a nozzle (138) through which ink is ejected from the ink chamber. A heater (142) for heating ink within the ink chamber and a conductor (144) for applying a current to the heater are provided between the passivation layers. A hydrophobic coating layer (129) is formed only on an outer surface of the metal layer. The hydrophobic coating layer is formed by forming the metal layer after forming a plating mold in a portion where the nozzle will be formed and then coating a material having the hydrophobic property on the metal layer. According to the above-described structure of the monolithic ink-jet printhead, ink ejection factors such as a directionality, a size, and an ejection speed of an ink droplet are improved so that an operating frequency can increase and a printing quality can be improved. Further, a surface of the printhead can be prevented from being polluted and has improved chemical resistance and abrasion resistance. <IMAGE>
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